9/27/2010	8:59:19 AM	Recipe started at 8:59 AM
9/27/2010	8:59:19 AM	Helium valve closed
9/27/2010	8:59:19 AM	BCl3 valve closed
9/27/2010	8:59:19 AM	PH3 valve closed
9/27/2010	8:59:19 AM	SiCl4 pre valve closed
9/27/2010	8:59:19 AM	SiCl4 post valve closed
9/27/2010	8:59:19 AM	Main Vac valve closed
9/27/2010	8:59:19 AM	Bypass valve closed
9/27/2010	8:59:19 AM	Bubbler valve closed
9/27/2010	8:59:19 AM	H2 valve opened
9/27/2010	8:59:19 AM	Helium MFC set to  0.000000
9/27/2010	8:59:19 AM	H2 MFC set to  500.000000
9/27/2010	8:59:19 AM	BCl3 MFC set to  0.000000
9/27/2010	8:59:19 AM	PHl3 MFC set to  0.000000
9/27/2010	8:59:19 AM	SiCl4 MFC set to  0.000000
9/27/2010	8:59:19 AM	Bypass solenoid MFC set to  0.000000
9/27/2010	8:59:19 AM	Tube furnace set to 0
9/27/2010	9:00:42 AM	Helium valve closed
9/27/2010	9:00:42 AM	BCl3 valve closed
9/27/2010	9:00:42 AM	PH3 valve closed
9/27/2010	9:00:42 AM	SiCl4 pre valve closed
9/27/2010	9:00:42 AM	SiCl4 post valve closed
9/27/2010	9:00:42 AM	Main Vac valve closed
9/27/2010	9:00:42 AM	Bypass valve closed
9/27/2010	9:00:42 AM	H2 valve opened
9/27/2010	9:00:42 AM	Bubbler valve opened
9/27/2010	9:00:42 AM	Helium MFC set to  0.000000
9/27/2010	9:00:42 AM	H2 MFC set to  500.000000
9/27/2010	9:00:42 AM	BCl3 MFC set to  0.000000
9/27/2010	9:00:42 AM	PHl3 MFC set to  0.000000
9/27/2010	9:00:42 AM	SiCl4 MFC set to  0.000000
9/27/2010	9:00:42 AM	Bypass solenoid MFC set to  0.000000
9/27/2010	9:00:42 AM	Tube furnace set to 1000
9/27/2010	9:20:42 AM	Helium valve closed
9/27/2010	9:20:42 AM	PH3 valve closed
9/27/2010	9:20:42 AM	Main Vac valve closed
9/27/2010	9:20:42 AM	Bypass valve closed
9/27/2010	9:20:42 AM	H2 valve opened
9/27/2010	9:20:42 AM	BCl3 valve opened
9/27/2010	9:20:42 AM	SiCl4 pre valve opened
9/27/2010	9:20:42 AM	SiCl4 post valve opened
9/27/2010	9:20:42 AM	Bubbler valve opened
9/27/2010	9:20:42 AM	Helium MFC set to  0.000000
9/27/2010	9:20:42 AM	H2 MFC set to  500.000000
9/27/2010	9:20:42 AM	BCl3 MFC set to  5.000000
9/27/2010	9:20:42 AM	PHl3 MFC set to  0.000000
9/27/2010	9:20:42 AM	SiCl4 MFC set to  50.000000
9/27/2010	9:20:42 AM	Bypass solenoid MFC set to  0.000000
9/27/2010	9:20:42 AM	Tube furnace set to 1000
9/27/2010	9:35:42 AM	H2 valve closed
9/27/2010	9:35:42 AM	BCl3 valve closed
9/27/2010	9:35:42 AM	PH3 valve closed
9/27/2010	9:35:42 AM	SiCl4 pre valve closed
9/27/2010	9:35:42 AM	SiCl4 post valve closed
9/27/2010	9:35:42 AM	Main Vac valve closed
9/27/2010	9:35:42 AM	Bypass valve closed
9/27/2010	9:35:42 AM	Helium valve opened
9/27/2010	9:35:42 AM	Bubbler valve opened
9/27/2010	9:35:42 AM	Helium MFC set to  500.000000
9/27/2010	9:35:42 AM	H2 MFC set to  0.000000
9/27/2010	9:35:42 AM	BCl3 MFC set to  0.000000
9/27/2010	9:35:42 AM	PHl3 MFC set to  0.000000
9/27/2010	9:35:42 AM	SiCl4 MFC set to  0.000000
9/27/2010	9:35:42 AM	Bypass solenoid MFC set to  0.000000
9/27/2010	9:35:42 AM	Tube furnace set to 0
9/27/2010	9:55:42 AM	Helium valve closed
9/27/2010	9:55:42 AM	H2 valve closed
9/27/2010	9:55:42 AM	BCl3 valve closed
9/27/2010	9:55:42 AM	PH3 valve closed
9/27/2010	9:55:42 AM	SiCl4 pre valve closed
9/27/2010	9:55:42 AM	SiCl4 post valve closed
9/27/2010	9:55:42 AM	Main Vac valve closed
9/27/2010	9:55:42 AM	Bypass valve closed
9/27/2010	9:55:42 AM	Bubbler valve closed
9/27/2010	9:55:42 AM	Helium MFC set to  0.000000
9/27/2010	9:55:42 AM	H2 MFC set to  0.000000
9/27/2010	9:55:42 AM	BCl3 MFC set to  0.000000
9/27/2010	9:55:42 AM	PHl3 MFC set to  0.000000
9/27/2010	9:55:42 AM	SiCl4 MFC set to  0.000000
9/27/2010	9:55:42 AM	Bypass solenoid MFC set to  0.000000
9/27/2010	9:55:43 AM	Tube furnace set to 0
9/27/2010	9:55:43 AM	Run finished at 9:55 AM
9/27/2010	10:17:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/27/2010	10:17:56 AM	Recipe started at 10:17 AM
9/27/2010	10:17:56 AM	H2 valve closed
9/27/2010	10:17:56 AM	BCl3 valve closed
9/27/2010	10:17:56 AM	PH3 valve closed
9/27/2010	10:17:56 AM	SiCl4 pre valve closed
9/27/2010	10:17:56 AM	SiCl4 post valve closed
9/27/2010	10:17:56 AM	Main Vac valve closed
9/27/2010	10:17:56 AM	Bypass valve closed
9/27/2010	10:17:56 AM	Bubbler valve closed
9/27/2010	10:17:56 AM	Helium valve opened
9/27/2010	10:17:56 AM	Helium MFC set to  500.000000
9/27/2010	10:17:56 AM	H2 MFC set to  0.000000
9/27/2010	10:17:56 AM	BCl3 MFC set to  0.000000
9/27/2010	10:17:56 AM	PHl3 MFC set to  0.000000
9/27/2010	10:17:56 AM	SiCl4 MFC set to  0.000000
9/27/2010	10:17:56 AM	Bypass solenoid MFC set to  0.000000
9/27/2010	10:17:57 AM	Tube furnace set to 0
9/27/2010	10:18:03 AM	Helium valve closed
9/27/2010	10:18:03 AM	H2 valve closed
9/27/2010	10:18:03 AM	BCl3 valve closed
9/27/2010	10:18:03 AM	PH3 valve closed
9/27/2010	10:18:03 AM	SiCl4 pre valve closed
9/27/2010	10:18:03 AM	SiCl4 post valve closed
9/27/2010	10:18:03 AM	Main Vac valve closed
9/27/2010	10:18:03 AM	Bypass valve closed
9/27/2010	10:18:03 AM	Bubbler valve closed
9/27/2010	10:18:03 AM	Helium MFC set to  0.000000
9/27/2010	10:18:03 AM	H2 MFC set to  0.000000
9/27/2010	10:18:03 AM	BCl3 MFC set to  0.000000
9/27/2010	10:18:03 AM	PHl3 MFC set to  0.000000
9/27/2010	10:18:03 AM	SiCl4 MFC set to  0.000000
9/27/2010	10:18:03 AM	Bypass solenoid MFC set to  0.000000
9/27/2010	10:18:03 AM	Tube furnace set to 0
9/27/2010	10:18:03 AM	Run finished at 10:18 AM
9/27/2010	10:18:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/27/2010	10:21:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/27/2010	10:21:09 AM	Recipe started at 10:21 AM
9/27/2010	10:21:09 AM	Helium valve closed
9/27/2010	10:21:09 AM	H2 valve closed
9/27/2010	10:21:09 AM	BCl3 valve closed
9/27/2010	10:21:09 AM	PH3 valve closed
9/27/2010	10:21:09 AM	SiCl4 pre valve closed
9/27/2010	10:21:09 AM	SiCl4 post valve closed
9/27/2010	10:21:09 AM	Main Vac valve closed
9/27/2010	10:21:09 AM	Bubbler valve closed
9/27/2010	10:21:09 AM	Bypass valve opened
9/27/2010	10:21:09 AM	Helium MFC set to  0.000000
9/27/2010	10:21:09 AM	H2 MFC set to  0.000000
9/27/2010	10:21:09 AM	BCl3 MFC set to  0.000000
9/27/2010	10:21:09 AM	PHl3 MFC set to  0.000000
9/27/2010	10:21:09 AM	SiCl4 MFC set to  0.000000
9/27/2010	10:21:09 AM	Bypass solenoid MFC set to  0.000000
9/27/2010	10:21:09 AM	Tube furnace set to 0
9/27/2010	10:21:50 AM	Helium valve closed
9/27/2010	10:21:50 AM	H2 valve closed
9/27/2010	10:21:50 AM	BCl3 valve closed
9/27/2010	10:21:50 AM	PH3 valve closed
9/27/2010	10:21:50 AM	SiCl4 pre valve closed
9/27/2010	10:21:50 AM	SiCl4 post valve closed
9/27/2010	10:21:50 AM	Bubbler valve closed
9/27/2010	10:21:50 AM	Main Vac valve opened
9/27/2010	10:21:50 AM	Bypass valve opened
9/27/2010	10:21:50 AM	Helium MFC set to  0.000000
9/27/2010	10:21:50 AM	H2 MFC set to  0.000000
9/27/2010	10:21:50 AM	BCl3 MFC set to  0.000000
9/27/2010	10:21:50 AM	PHl3 MFC set to  0.000000
9/27/2010	10:21:50 AM	SiCl4 MFC set to  0.000000
9/27/2010	10:21:50 AM	Bypass solenoid MFC set to  0.000000
9/27/2010	10:21:50 AM	Tube furnace set to 0
9/27/2010	10:21:51 AM	Run finished at 10:21 AM
9/27/2010	10:21:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
